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Nondestructive Evaluation and Materials Characterization Using Photothermal-Optical-Beam-Deflection Imaging

机译:使用光热-光学束偏转成像的无损评估和材料表征

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摘要

Photothermal-optical-beam-deflection (PTOBD) imaging involves use of a focused, modulated laser beam to locally heat a sample and a second laser beam to probe the resulting changes in sample temperature. For opaque samples, the photothermal heating occurs essentially at the surface and temperature changes in the bulk occur via thermal diffusion to a depth below the surface of the order of a thermal-diffusion length, δ = (2K/PCω)½, where K is the thermal conductivity, p is the density, C is the specific heat, and ω is the modulation frequency. Since the limiting factor in definition/resolution is not the thermal diffusion length [1,2], features of the order of the heating-laser-beam diameter or smaller can be investigated, even at relatively low modulation frequencies. Lateral spatial resolution for subsurface features much closer to the surface than a diffusion length is independent of the diffusion length and is determined principally by the diameter of the heating beam, although the diameter of the probe beam can affect the resolution [1–4]. Generally, the limiting factors on spatial resolution in PTOBD imaging are the heating-beam diameter, the shape and depth of the subsurface feature being imaged, and the modulation frequency (to a lesser extent) [2,4]. This paper presents images of a number of important classes of materials with resolution less than 10 urn. Some contrast issues and underlying materials issues are discussed qualitatively.
机译:光热光束偏转(PTOBD)成像涉及使用聚焦的调制激光束局部加热样品,使用第二激光束探测样品温度的变化。对于不透明的样品,光热加热基本上发生在表面,并且本体的温度变化是通过热扩散到表面以下的深度而发生的,其深度约为热扩散长度δ=(2K /PCω)½,其中K为热导率,p是密度,C是比热,ω是调制频率。由于分辨率/分辨率的限制因素不是热扩散长度[1,2],因此即使在相对较低的调制频率下,也可以研究加热激光束直径或更小数量级的特征。次表面特征的横向空间分辨率比扩散长度更接近表面,而与扩散长度无关,并且主要由加热束的直径决定,尽管探测束的直径会影响分辨率[1-4]。通常,PTOBD成像中空间分辨率的限制因素是加热束直径,要成像的地下特征的形状和深度以及调制频率(较小程度)[2,4]。本文展示了分辨率低于10微米的许多重要材料类别的图像。定性地讨论了一些对比问题和潜在的材料问题。

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